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陣列波導光柵解復用器的偏振相關損耗的優化

Optimization of Polarization-Dependent Loss of Arrayed Waveguide Grating Demultiplexer

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摘要

對硅基二氧化硅陣列波導光柵解復用器(AWG DEMUX)的偏振相關損耗(PDL)進行了優化。理論分析了引起AWG偏振相關性的物理因素以及消除偏振相關性的工藝方法和條件。利用化學氣相沉積、光刻和刻蝕等半導體工藝制備了AWG DEMUX芯片,并結合理論分析對包層材料中的硼(B)、磷(P)含量進行了優化調整,成功地將芯片的PDL降低至0.12 dB,使PDL參數滿足芯片的商用化需求。

Abstract

In this work, the polarization-dependent loss (PDL) of a SiO2/Si arrayed waveguide demultiplexer (AWG DEMUX) is optimized. The physical factors causing the polarization dependence of the AWG and the process methods and conditions required to eliminate this dependence are analyzed theoretically. AWG DEMUX chips are fabricated by semiconductor processes, such as chemical-vapor deposition, photolithography, and etching. The boron and phosphorus contents in the cladding material are optimized and adjusted according to theoretical analysis. The PDLs of the chips are successfully reduced to 0.12 dB so that the PDL parameters meet the chip''s commercialization requirements.

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中圖分類號:TN256

DOI:10.3788/CJL202047.0106003

所屬欄目:光纖光學與光通信

收稿日期:2019-08-20

修改稿日期:2019-09-26

網絡出版日期:2020-01-01

作者單位    點擊查看

孫健:鄭州大學物理學院, 河南 鄭州 450001河南仕佳光子科技股份有限公司, 河南 鶴壁 458030
吳遠大:河南仕佳光子科技股份有限公司, 河南 鶴壁 458030
吳衛鋒:河南仕佳光子科技股份有限公司, 河南 鶴壁 458030
單崇新:鄭州大學物理學院, 河南 鄭州 450001

聯系人作者:單崇新([email protected])

【1】Pan P, An J M, Wang Y, et al. Compact 4-channel AWGs for CWDM and LAN WDM in data center monolithic applications [J]. Optics & Laser Technology. 2015, 75: 177-181.

【2】Hassan K, Khalil D, Malak M, et al. Design of an arrayed waveguide grating optical demultiplexer for CWDM applications [J]. Journal of Optics A: Pure and Applied Optics. 2008, 10(7): 075307.

【3】Tangdiongga G E, Lim T G, Li J, et al. Optical design of 4-channel TOSA/ROSA for CWDM applications [J]. Proceedings of SPIE. 2008, 6899: 68990I.

【4】Juhari N, Menon P S, Ehsan A A, et al. 4-channel double S-shaped AWG demultiplexer on SOI for CWDM . [C]∥2015 17th International Conference on Advanced Communication Technology (ICACT), July 1-3, 2015, Seoul, Korea. New York: IEEE. 2015, 436-440.

【5】Yurt N, Rausch K, Kost A R, et al. Design and fabrication of a broadband polarization and temperature insensitive arrayed waveguide grating on InP [J]. Optics Express. 2005, 13(14): 5535-5541.

【6】Wildermuth E, Nadler C, Lanker M, et al. Penalty-free polarisation compensation of SiO2/Si arrayed waveguide grating wavelength multiplexers using stress release grooves [J]. Electronics Letters. 1998, 34(17): 1661-1662.

【7】Lu P, Liu D M, Chen J, et al. Novel polarization-insensitive arrayed-waveguide grating multiplexer design [J]. Proceedings of SPIE. 2002, 4904: 495-499.

【8】An J M, Ban S L, Liang X X, et al. Numerical analysis for a SiO2/Si waveguide stress-birefringence [J]. Chinese Journal of Semiconductors. 2005, 26(7): 1454-1458.
安俊明, 班士良, 梁希俠, 等. SiO2/Si 波導應力雙折射數值分析 [J]. 半導體學報. 2005, 26(7): 1454-1458.

【9】de Peralta L G, Bernussi A A, Temkin H, et al. Silicon-dioxide waveguides with low birefringence [J]. IEEE Journal of Quantum Electronics. 2003, 39(7): 874-879.

引用該論文

Sun Jian,Wu Yuanda,Wu Weifeng,Shan Chongxin. Optimization of Polarization-Dependent Loss of Arrayed Waveguide Grating Demultiplexer[J]. Chinese Journal of Lasers, 2020, 47(1): 0106003

孫健,吳遠大,吳衛鋒,單崇新. 陣列波導光柵解復用器的偏振相關損耗的優化[J]. 中國激光, 2020, 47(1): 0106003

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